{"id":5342,"date":"2014-07-07T11:22:27","date_gmt":"2014-07-07T07:22:27","guid":{"rendered":"https:\/\/butis-m.ru\/?p=5342"},"modified":"2014-07-07T11:40:21","modified_gmt":"2014-07-07T07:40:21","slug":"single-port-saw-resonators-design","status":"publish","type":"post","link":"https:\/\/butis-m.ru\/en\/articles-en\/single-port-saw-resonators-design\/","title":{"rendered":"Single Port SAW Resonators Design"},"content":{"rendered":"<p style=\"text-align: justify;\">This work deals with some aspects of resonator\u00a0performance improvement on unidirectional substrates with\u00a0arbitrary reflection angle.<\/p>\n<p style=\"text-align: justify;\">A design concept is proposed based on the use of resonators with\u00a0slight (by about 1-2%, depending on the material properties)\u00a0frequency increase (or decrease, for opposite phase) of the IDT\u00a0pitch in the transducer center for bi-directional substrates. For\u00a0naturally unidirectional orientations properly placed linear chirp\u00a0transducers with pitch variation of the same order of magnitude\u00a0are found to give practically useful results, while for arbitrary\u00a0phase angles in between of these two extreme cases the position of\u00a0the transducer pitch maximum (minimum for opposite phase) is\u00a0shifted from the center to the corresponding side of the\u00a0transducer in accordance with the phase.<\/p>\n<p style=\"text-align: justify;\">Relevant the results are compared with experimental data on\u00a0langasite substrates.<\/p>\n<p style=\"text-align: justify;\">NSPUDT, SAW, resonator, transducer, phase<\/p>\n<h2 style=\"text-align: justify;\">INTRODUCTION<\/h2>\n<p style=\"text-align: justify;\">SAW resonators [1, 2] are commonly used in filters and\u00a0sensors. In the latter the choice of substrate for particular\u00a0sensor application may result in arbitrarily oriented cuts that as\u00a0a rule do not present the convenience of zero (or 90, 180 and\u00a0270) degrees phase of the reflection coefficient as on \u201cbidirectional\u201d\u00a0and on \u201cpure unidirectional\u201d substrates.<\/p>\n<p style=\"text-align: justify;\">As shown by Uno [3] and later by Ebata [4] resonator\u00a0properties on ordinary substrates with bi-directional\u00a0transducers may be substantially improved by using different\u00a0pitches in transducer region and in grating regions.\u00a0Additionally in QARP resonators [2] the pitches are slightly\u00a0modified in order to obtain negligible disturbance of electrode\u00a0periodicity and thus to reduce the level of conversion into bulk\u00a0waves at discontinuities related to the IDT-grating transition\u00a0region. In this work the QARP concept is extended to\u00a0application of transducers with varying pitch and new design\u00a0concepts are found that are generalized to arbitrary phase\u00a0angle of the reflection coefficient. For the full 360 range of\u00a0existing phase angles the space variations of the IDT pitch are\u00a0found that simultaneously improve the resonator conductance, \u00a0reduce the level of unwanted side band signals and eliminate\u00a0the abrupt change of periodicity characteristic of ordinary\u00a0designs [5] thus realizing the conditions similar to those\u00a0existing in QARP [4].<\/p>\n<h2 style=\"text-align: justify;\">RESONATOR DESIGN METHOD FOR IDEAL NSPUDT\u00a0CASE<\/h2>\n<p style=\"text-align: justify;\">As was shown by Uno [3] in order to obtain highest\u00a0resonator conductance and lowest level of spurious out-of band\u00a0signals the maximum of IDT conductance should coincide with\u00a0the resonator resonance frequency or to be relatively close to it.<\/p>\n<div id=\"attachment_5349\" style=\"width: 402px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic461.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-5349\" class=\"size-full wp-image-5349\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic461.jpg\" alt=\"Figure 1. Illustration of the design concept.\" width=\"392\" height=\"259\" \/><\/a><p id=\"caption-attachment-5349\" class=\"wp-caption-text\">Figure 1. Illustration of the design concept.<\/p><\/div>\n<p style=\"text-align: justify;\">This is achieved by changing the IDT central frequency\u00a0(increasing it in most cases, while examples of materials exist\u00a0where it needs to be decreased). Slight detuning from discussed\u00a0by Uno optimal conditions used in QARP approach [4] does\u00a0not affect much the resonator performance, while giving the \u00a0flexibility of changing the IDT pitch in such a way, so as to\u00a0avoid narrow or wide gaps between reflectors and the\u00a0transducer.<\/p>\n<p style=\"text-align: justify;\">In case of a substrate where a NSPUDT conditions are met,\u00a0such as for example langasite (yxlt\/48.5\u00ba\/26.6\u00ba, Euler angles \u03bb,\u00a0\u03b8, \u03bc = 0, 138.5, 26.6\u00ba) the shape of conductance has two equal\u00a0maximums with values that are almost two times lower than\u00a0the single one of a bi-directional IDT. This is the reason why\u00a0resonators with such transducers have somewhat lower\u00a0conductance at resonance and higher relative level of out-ofband\u00a0unwanted signals. Applying the Uno concept and simply\u00a0shifting the IDT frequency up or down increases the relative\u00a0level of unwanted signals.<\/p>\n<div id=\"attachment_5347\" style=\"width: 402px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic471.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-5347\" class=\"size-full wp-image-5347\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic471.jpg\" alt=\"Figure 2. Example of resonator (solid) and IDT conductance for ordinary IDT (top graph) and for linear chirp IDT (lower graph) on a NSPUDT substrate.\" width=\"392\" height=\"541\" \/><\/a><p id=\"caption-attachment-5347\" class=\"wp-caption-text\">Figure 2. Example of resonator (solid) and IDT conductance for ordinary\u00a0IDT (top graph) and for linear chirp IDT (lower graph) on a NSPUDT\u00a0substrate.<\/p><\/div>\n<p style=\"text-align: justify;\">In order to overcome this drawback the unidirectional\u00a0transducer may be in one or another way transformed to\u00a0acquire some features of a bi-directional IDT. Some past\u00a0experience has shown that transducers with pitch variation\u00a0notably chirp transducers at some conditions may acquire<br \/>\npronounced unidirectional properties on ordinary substrates [6].<\/p>\n<p style=\"text-align: justify;\">When a NSPUDT transducer has a linear chirp structure it\u00a0loses to some extent its unidirectional properties and its\u00a0conductance shape becomes more similar to that of a bidirectional\u00a0IDT. Decreasing or increasing the pitch causes the\u00a0left or right peak of the IDT conductance to be enhanced,\u00a0respectively, while the other one is suppressed\u00a0This design concept is illustrated in Fig. 1 where the upper\u00a0layout corresponds to a known approach (for example [5])\u00a0where an additional gap between the IDT and the right reflector\u00a0is used and the lower layout shows how the IDT pitch is\u00a0changed in order to modify the IDT conductance and to\u00a0eliminate the additional gap between the IDT and the reflector,\u00a0thus realizing to some extent the principles of QARP resonators\u00a0[4].<\/p>\n<p style=\"text-align: justify;\">Figure 2 illustrates the behavior of the IDT conductance\u00a0and of the resulting resonator response for both designs (shown\u00a0in Fig.1) where the relative frequency is the frequency\u00a0normalized to the Bragg frequency of reflectors. Both\u00a0structures are modeled for the reflection phase strictly equal to\u00a090\u00ba most favorable for NSPUDT effect. Note that the reflection\u00a0phase may have different definitions due to arbitrary choice of\u00a0the reflection origin point. Unlike in [5] we will use here the<br \/>\nfollowing phase definition [7] \u03c8 = Arg(k12\u03b6* \u2044 \u03b6) = Arg(k12) \u20132Arg(\u03b6). It means that the case of \u03c8 = 0 corresponds to ordinary\u00a0substrate with thin electrodes, \u03c8 = 180\u00ba corresponds to the\u00a0opposite bi-directional case and \u03c8 = \u00b190\u00ba corresponds to\u00a0maximal NSPUDT effect, positive \u03c8 corresponds to larger\u00a0radiation from right side of IDT. The reflectors contain 263\u00a0strips and the transducers have 126 electrodes. The periods of\u00a0the gratings are the same in both cases and correspond to the\u00a0required central frequency that preferably would be in the\u00a0middle of the Bragg band. The pitch of the chirp transducer\u00a0changes from that of the gratings to a value slightly lower (in\u00a0this example by about 0.9%) or slightly larger (in general case). \u00a0As a result the larger maximum of the chirp IDT conductance\u00a0shifts closer to the Bragg frequency of reflectors. The position\u00a0of reflectors is thus slightly adjusted together with the change\u00a0of the IDT dimensions in order to realize QARP-like conditions\u00a0[4].<\/p>\n<p style=\"text-align: justify;\">Comparison of the responses in Fig.2 demonstrates about\u00a010-15% increase in resonator conductance and some decrease\u00a0of the relative level of unwanted signals. Improvement in\u00a0properties is further enhanced by reduction of scattering from\u00a0the abrupt change in periodicity.<\/p>\n<p style=\"text-align: justify;\">This design approach becomes seriously more important for \u00a0practical cases of non-ideal natural unidirectivity. As a rule the\u00a0phase of the reflection coefficient depends on the thickness of\u00a0the metal. For langasite the useful value of reflection from the\u00a0gratings is achieved at a thickness of Al above 1% of the\u00a0wavelength. At this thickness the phase \u03c8 reaches 120\u00ba for 50%\u00a0metallization ratio and may be even larger with wider\u00a0electrodes.<\/p>\n<h2 style=\"text-align: justify;\">RESONATOR DESIGN METHOD FOR GENERAL CASE<\/h2>\n<p style=\"text-align: justify;\">As shown in Figure 3 the ideal NSPUDT case with \u03c8 = 90\u00ba\u00a0is rarely achievable in practically interesting cases. In order to\u00a0obtain sufficiently high reflection amplitude one has to choose\u00a0high enough aluminum thickness (2-4% of the wavelength) and\u00a0metallization coefficient (between 50 and 75%). In these\u00a0conditions the reflection phase stabilizes closer to 120\u00ba and this\u00a0feature has to be taken care of in the design, for example as in\u00a0[5].<\/p>\n<div id=\"attachment_5345\" style=\"width: 402px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic48.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-5345\" class=\"size-full wp-image-5345\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic48.jpg\" alt=\"Figure 3. Amplitude and phase of the reflection coefficient of Al strips with different metallization ratios on langasite yxlt\/48.5\u00b0\/26.6\u00b0.\" width=\"392\" height=\"248\" \/><\/a><p id=\"caption-attachment-5345\" class=\"wp-caption-text\">Figure 3. Amplitude and phase of the reflection coefficient of Al strips with<br \/>different metallization ratios on langasite yxlt\/48.5\u00b0\/26.6\u00b0.<\/p><\/div>\n<p style=\"text-align: justify;\">If the variable electrodes pitch concept described above is\u00a0applied to a substrate with \u03c8 = 0, the symmetry has to be\u00a0observed in order to obtain a QARP-like response. For this case\u00a0the pitch in one half of the IDT goes down linearly and then it\u00a0goes up in the second half. The highest instantaneous frequency\u00a0of the IDT is reached in the middle of the structure, while the\u00a0average frequency satisfies QARP conditions. For the \u03c8 = 180\u00ba\u00a0the inverse relation is true and the IDT frequency is the lowest\u00a0in the centre of the structure. The modeling has shown that the\u00a0resonator performance in these arrangements is very close to\u00a0the performance of the corresponding QARP arrangements.\u00a0But in such cases the variable pitch is usually unnecessary.<\/p>\n<p style=\"text-align: justify;\">However, in this way we get a useful hint for approaching\u00a0intermediate cases when the reflection coefficient phase is not\u00a00, 180, 90 or 270\u00ba. The intermediate phase difference requires\u00a0intermediate positioning of the lowest (or highest) pitch region\u00a0inside the transducer area.<\/p>\n<div id=\"attachment_5357\" style=\"width: 408px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic511.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-5357\" class=\"size-full wp-image-5357\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic511.jpg\" alt=\"Figure 4. Electrode pitch versus electrode number for 120\u00b0 reflection phase.\" width=\"398\" height=\"209\" \/><\/a><p id=\"caption-attachment-5357\" class=\"wp-caption-text\">Figure 4. Electrode pitch versus electrode number for 120\u00b0 reflection phase.<\/p><\/div>\n<p style=\"text-align: justify;\">This is illustrated in Figure 4, where the details of resonator\u00a0design are shown for \u03c8 = 120\u00b0. The linear change of IDT pitch\u00a0is approximated by 9 sections with 14 electrodes (126\u00a0electrodes total) with constant pitch in each section. The pitch\u00a0of the 263 electrodes identical gratings is equal to 8.077\u00a0microns and the pitch of the IDT section grows from 8.09\u00a0microns in the first section from the left to 8.172 microns in the\u00a0seventh section from the left and falls to 8.144 microns in the\u00a0ninth (last) section. Note that for such small pitch variations\u00a0linear change of the pitch used in this design practically does\u00a0not differ from the linear change of the IDT central frequency\u00a0as in chirp structures, and both variants may be used with\u00a0similar results.<\/p>\n<p style=\"text-align: justify;\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic491.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-5343\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic491.jpg\" alt=\"Pic49\" width=\"373\" height=\"91\" \/><\/a><\/p>\n<p style=\"text-align: justify;\">The position of the IDT pitch maximum in the vicinity of\u00a0the seventh section is realizing to some extent the condition of\u00a0maximum energy transfer discussed in [5]. This position is \u00a0relatively insensitive to slight shifts and the resonator\u00a0performance is not much affected by modifying the linear chirp\u00a0pitch variation by partitioning into sections as in Table 1. A\u00a0reasonable suggestion for the placement of the IDT point where\u00a0the pitch differs the most from the gratings pitch is the<br \/>\nfollowing:<\/p>\n<p style=\"text-align: justify;\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic501.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-5359\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic501.jpg\" alt=\"Pic50\" width=\"324\" height=\"61\" \/><\/a><\/p>\n<p style=\"text-align: justify;\">where XM is the coordinate of this point measured from the IDT\u00a0centre (positive to the right), L is the IDT length, and the phase\u00a0\u03c8 varies from -180\u00ba to 180\u00ba. The IDT pitch must be smaller\u00a0than gratings pitch if |\u03c8| &lt; 90\u00ba and larger if |\u03c8| &gt; 90\u00ba. Both\u00a0variants are applicable if \u03c8 is quite close to \u00b190\u00ba<\/p>\n<div id=\"attachment_5355\" style=\"width: 408px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic52.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-5355\" class=\"size-full wp-image-5355\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic52.jpg\" alt=\"Figure 5. Resonator performance as designed for langasite\" width=\"398\" height=\"278\" \/><\/a><p id=\"caption-attachment-5355\" class=\"wp-caption-text\">Figure 5. Resonator performance as designed for langasite<\/p><\/div>\n<p style=\"text-align: justify;\">Modelling of a resonator designed for LGS, following the\u00a0Table 1 with propagation loss data fitted from experiment,\u00a0demonstrates a low level of out-of-band signals, high\u00a0conductance (Figure 5), and large separation of the resonance\u00a0and antiresonance frequencies.<\/p>\n<h2 style=\"text-align: justify;\">COMPARISON WITH EXPERIMENT<\/h2>\n<p style=\"text-align: justify;\">Figures 6 and 7 show the comparison of the experimental\u00a0and modelled responses for the design described above (with\u00a0COM-parameters corrected from experimental data). Test\u00a0samples with metallization ratio about 70% were initially\u00a0obtained with an excessive thickness (about 0.6 microns). This\u00a0has resulted in increased reflection amplitude in the IDT and in\u00a0gratings and correspondingly increased the Bragg bandwidth\u00a0that can be evaluated quite precisely from the distance between\u00a0the right and the left additional peaks in Figure 7. Etching\u00a0excessive metal in 0.8% KOH solution for about 6 minutes has\u00a0resulted in a correct value of the Al film average thickness\u00a0(about 0.4 microns) that was initially used for this design in\u00a0order to obtain low level of out-of-band signals.<\/p>\n<p style=\"text-align: justify;\">The agreement of the model and of experimental data is\u00a0quite satisfactory, especially in details related to the out-ofband\u00a0features shown in Figure 7.<\/p>\n<div id=\"attachment_5351\" style=\"width: 401px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic54.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-5351\" class=\"size-full wp-image-5351\" src=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic54.jpg\" alt=\"Figure 7. Measured and modelled conductance of the resonators at small scale showing the out-of-band response details.\" width=\"391\" height=\"215\" \/><\/a><p id=\"caption-attachment-5351\" class=\"wp-caption-text\">Figure 7. Measured and modelled conductance of the resonators at small<br \/>scale showing the out-of-band response details.<\/p><\/div>\n<p style=\"text-align: justify;\">It is important to note that the photomask for the test\u00a0samples has been obtained with the simplest averaging\u00a0procedure while using relatively large step of the electrode\u00a0width. The error accumulating from such coarse\u00a0implementation did not affect the response shape significantly.<\/p>\n<h2 style=\"text-align: justify;\">CONCLUSIONS<\/h2>\n<p style=\"text-align: justify;\">The design method was presented for single port resonators\u00a0on substrates with arbitrary phase of reflection coefficient, thus\u00a0eliminating abrupt changes in periodicity as in QARP. As a\u00a0result, for any phase difference, this method enables devices to\u00a0have a low level of out-of-band response, large conductance\u00a0and large difference between the resonance and the\u00a0antiresonance frequencies. This design is expected to be useful\u00a0for waves that are especially sensitive to perturbations in the\u00a0periodicity, such as leaky waves. The design concept was\u00a0verified and good resonator performance has been achieved\u00a0with Al electrodes on langasite.<\/p>\n<h2 style=\"text-align: justify;\">REFERENCES<\/h2>\n<ol>\n<li>E. A. Ash, Surface wave gratings and resonators, IEEE Symp. on MTT, 1970.<\/li>\n<li>E. J. Staples, UHF surface acoustic wave resonators, Proc. of the Annual Symp. On Frequency Control, p.280, 1974.<\/li>\n<li>T. Uno and H. Jumonji, Optimization of quartz SAW resonator structure with groove gratings. IEEE Trans. SU, vol. SU-29, No. 6, p.299-310 (1982)<\/li>\n<li>Y. Ebata, Suppression of bulk-scattering loss in SAW resonator with quasi-constant acoustic reflection periodicity. IEEE Ultrasonics Symp. 1988, p. 91-96.<\/li>\n<li>D. P. Morgan, S. Zhgoon, A. Shvetsov, E. Semenova and V. Semenov. One-port SAW resonators using natural SPUDT substrates. IEEE Ultrasonics Symp. 2005, p. 446-449.<\/li>\n<li>S. A. Zhgoon, V. A. Kalinin, S. A. Orlov, B. N. Dunaev. Unidirectionnality in dispersive SAW transducers. Electronics Lett., v.30, No. 9, 1994, p.742-743<\/li>\n<li>K. Hashimoto, Surface Acoustic \u00a0Wave Devices in Telecommunications. Springer, 2000, 330 pages.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>This work deals with some aspects of resonator\u00a0performance improvement on unidirectional substrates with\u00a0arbitrary reflection angle. A design concept is proposed based on the use of resonators with\u00a0slight (by about 1-2%, depending on the material properties)\u00a0frequency increase (or decrease, for opposite phase) of the IDT\u00a0pitch in the transducer center for bi-directional substrates. For\u00a0naturally unidirectional orientations properly [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"inline_featured_image":false,"footnotes":""},"categories":[8],"tags":[],"class_list":["post-5342","post","type-post","status-publish","format-standard","hentry","category-articles-en"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.6 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Single Port SAW Resonators Design - Butis<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/butis-m.ru\/en\/articles-en\/single-port-saw-resonators-design\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Single Port SAW Resonators Design - Butis\" \/>\n<meta property=\"og:description\" content=\"This work deals with some aspects of resonator\u00a0performance improvement on unidirectional substrates with\u00a0arbitrary reflection angle. A design concept is proposed based on the use of resonators with\u00a0slight (by about 1-2%, depending on the material properties)\u00a0frequency increase (or decrease, for opposite phase) of the IDT\u00a0pitch in the transducer center for bi-directional substrates. For\u00a0naturally unidirectional orientations properly [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/butis-m.ru\/en\/articles-en\/single-port-saw-resonators-design\/\" \/>\n<meta property=\"og:site_name\" content=\"Butis\" \/>\n<meta property=\"article:published_time\" content=\"2014-07-07T07:22:27+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2014-07-07T07:40:21+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/butis-m.ru\/wp-content\/uploads\/2014\/07\/Pic461.jpg\" \/>\n<meta name=\"author\" content=\"abutis\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"abutis\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"11 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/butis-m.ru\\\/en\\\/articles-en\\\/single-port-saw-resonators-design\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/butis-m.ru\\\/en\\\/articles-en\\\/single-port-saw-resonators-design\\\/\"},\"author\":{\"name\":\"abutis\",\"@id\":\"https:\\\/\\\/butis-m.ru\\\/ru\\\/#\\\/schema\\\/person\\\/f6d022145d542f3bdaad5d9863a9ce2e\"},\"headline\":\"Single Port SAW Resonators Design\",\"datePublished\":\"2014-07-07T07:22:27+00:00\",\"dateModified\":\"2014-07-07T07:40:21+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/butis-m.ru\\\/en\\\/articles-en\\\/single-port-saw-resonators-design\\\/\"},\"wordCount\":2111,\"image\":{\"@id\":\"https:\\\/\\\/butis-m.ru\\\/en\\\/articles-en\\\/single-port-saw-resonators-design\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/butis-m.ru\\\/wp-content\\\/uploads\\\/2014\\\/07\\\/Pic461.jpg\",\"articleSection\":[\"Articles\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/butis-m.ru\\\/en\\\/articles-en\\\/single-port-saw-resonators-design\\\/\",\"url\":\"https:\\\/\\\/butis-m.ru\\\/en\\\/articles-en\\\/single-port-saw-resonators-design\\\/\",\"name\":\"Single Port SAW Resonators Design - 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